Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

被引：4
|
作者：
Luo, Song-Jie [1 ]
Sasaki, Osami [1 ,2 ]
Liu, Yong-Xin [1 ]
Li, Xiao-Yan [1 ]
Lin, Zhi-Li [1 ]
Pu, Ji-Xiong [1 ]
机构：
[1] Huaqiao Univ, Coll Informat Sci & Engn, Fujian Prov Key Lab Light Propagat & Transformat, Xiamen 361021, Fujian, Peoples R China
[2] Niigata Univ, Niigata 9502181, Japan
来源：
OPTICAL REVIEW | 2017年 / 24卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Interferometry; Optical time domain; reflectometry; Phase measurement; PROFILE MEASUREMENT; INTERFEROGRAMS;
D O I：
10.1007/s10043-016-0291-x
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A general equation of the interference signal of white-light scanning interferometer (WSI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in WSI is proposed to measure exactly a reflecting surface position. A dispersion phase caused by the two sides of unequal length in a beam splitter is detected with a spectrally resolved interferometer (SRI). A spectral distribution is obtained by using Fourier transform from an interference signal detected with a WSI. The spectral phase of the SRI is subtracted from the spectral phase of the WSI to get a dispersion-free spectral phase, which provides an improved complex-valued interference signal where a position of zero phase is almost equal to a position of maximum amplitude. An accurate measurement is achieved by using the position of zero phase.
引用
收藏
页码：27 / 32
页数：6
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