Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

被引：4

作者：

Luo, Song-Jie ^{[1
]}

Sasaki, Osami ^{[1
,2
]}

Liu, Yong-Xin ^{[1
]}

Li, Xiao-Yan ^{[1
]}

Lin, Zhi-Li ^{[1
]}

Pu, Ji-Xiong ^{[1
]}

机构：

[1] Huaqiao Univ, Coll Informat Sci & Engn, Fujian Prov Key Lab Light Propagat & Transformat, Xiamen 361021, Fujian, Peoples R China

[2] Niigata Univ, Niigata 9502181, Japan

来源：

OPTICAL REVIEW | 2017年 / 24卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Interferometry; Optical time domain; reflectometry; Phase measurement; PROFILE MEASUREMENT; INTERFEROGRAMS;

D O I：

10.1007/s10043-016-0291-x

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A general equation of the interference signal of white-light scanning interferometer (WSI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in WSI is proposed to measure exactly a reflecting surface position. A dispersion phase caused by the two sides of unequal length in a beam splitter is detected with a spectrally resolved interferometer (SRI). A spectral distribution is obtained by using Fourier transform from an interference signal detected with a WSI. The spectral phase of the SRI is subtracted from the spectral phase of the WSI to get a dispersion-free spectral phase, which provides an improved complex-valued interference signal where a position of zero phase is almost equal to a position of maximum amplitude. An accurate measurement is achieved by using the position of zero phase.

引用

页码：27 / 32

页数：6

共 50 条

[21] Dispersion measurements of a birefringent holey fiber using white-light spectral interferometry
Ciprian, D.
Hlubina, P.
Trojkova, J.
15TH CZECH-POLISH-SLOVAK CONFERENCE ON WAVE AND QUANTUM ASPECTS OF CONTEMPORARY OPTICS, 2007, 6609
[22] Rapid measurement of large step heights using a microscopic white-light spectral interferometer
Guo, Tong
Yuan, Lin
Chen, Zhuo
Gao, Feng
Jiang, Xiangqian
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES, 2019, 7 (02):
[23] Accuracy improvement of a white-light spectral interferometer using a line-by-line spectral calibration method
Guo, Tong
Zhao, Guanhua
Tang, Dawei
Weng, Qianwen
Gao, Feng
Jiang, Xiangqian
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES, 2020, 8 (02):
[24] Heterodyne white-light interferometer using optical grating
Hirai, A
Matsumoto, H
APPLICATIONS OF PHOTONIC TECHNOLOGY 4: CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION, 2000, 4087 : 1102 - 1105
[25] Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer
Taudt, Ch.
Augenstein, A.
Baselt, T.
Assmann, H.
Greiner, A.
Koch, E.
Hartmann, P.
SMART SENSORS, ACTUATORS, AND MEMS VII; AND CYBER PHYSICAL SYSTEMS, 2015, 9517
[26] Demonstration of a tunable-bandwidth white-light interferometer using anomalous dispersion in atomic vapor
Pati, G. S.
Salit, M.
Salit, K.
Shahriar, M. S.
PHYSICAL REVIEW LETTERS, 2007, 99 (13)
[27] White-light Spectral Scanning Interferometry for Surface Measurement System
Wang, Chenchen
Cao, Nailiang
Lu, Jin
Guan, Jiayan
6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2010, 7544
[28] Measurement of birefringence dispersion in optical fiber using a method of white-light spectral interferometry
Hlubina, P
Martynkien, T
Urbanczyk, W
ICTON 2004: 6TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, PROCEEDINGS, VOL 2, 2004, : 202 - 205
[29] Surface measurement through transparent medium using Linnik type white-light spectral interferometer
Guo, Tong
Weng, Qianwen
Chen, Zhuo
Fu, Xing
Hu, Xiaotang
SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018), 2018, 10827
[30] Direct measurement of group dispersion of optical components using white-light spectral interferometry
Chlebus, R.
Hlubina, P.
Ciprian, D.
OPTO-ELECTRONICS REVIEW, 2007, 15 (03) : 144 - 148

← 1 2 3 4 5 →