Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

被引：4

作者：

Luo, Song-Jie ^{[1
]}

Sasaki, Osami ^{[1
,2
]}

Liu, Yong-Xin ^{[1
]}

Li, Xiao-Yan ^{[1
]}

Lin, Zhi-Li ^{[1
]}

Pu, Ji-Xiong ^{[1
]}

机构：

[1] Huaqiao Univ, Coll Informat Sci & Engn, Fujian Prov Key Lab Light Propagat & Transformat, Xiamen 361021, Fujian, Peoples R China

[2] Niigata Univ, Niigata 9502181, Japan

来源：

OPTICAL REVIEW | 2017年 / 24卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Interferometry; Optical time domain; reflectometry; Phase measurement; PROFILE MEASUREMENT; INTERFEROGRAMS;

D O I：

10.1007/s10043-016-0291-x

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A general equation of the interference signal of white-light scanning interferometer (WSI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in WSI is proposed to measure exactly a reflecting surface position. A dispersion phase caused by the two sides of unequal length in a beam splitter is detected with a spectrally resolved interferometer (SRI). A spectral distribution is obtained by using Fourier transform from an interference signal detected with a WSI. The spectral phase of the SRI is subtracted from the spectral phase of the WSI to get a dispersion-free spectral phase, which provides an improved complex-valued interference signal where a position of zero phase is almost equal to a position of maximum amplitude. An accurate measurement is achieved by using the position of zero phase.

引用

页码：27 / 32

页数：6

共 50 条

[1] Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer
Song-Jie Luo
Osami Sasaki
Yong-Xin Liu
Xiao-Yan Li
Zhi-Li Lin
Ji-Xiong Pu
Optical Review, 2017, 24 : 27 - 32
[2] Lateral scanning white-light interferometer
Olszak, A
APPLIED OPTICS, 2000, 39 (22) : 3906 - 3913
[3] White-light interferometer automatically cancels dispersion
Resch, Kevin
Puvanathasan, Prabakar
Bizheva, Kostadinka
Lundeen, Jeff
Mitchell, Morgan
LASER FOCUS WORLD, 2007, 43 (11): : 85 - +
[4] White-light interferometer automatically cancels dispersion
University of Waterloo, Waterloo, Ont. N2L 3G1, Canada
不详
不详
Laser Focus World, 2007, 11 (85-90):
[5] White-light interferometer with partial correlogram scanning
E. V. Sysoev
Optoelectronics, Instrumentation and Data Processing, 2007, 43 (1) : 83 - 89
[6] Auto-scanning white-light interferometer
Chen, Jin-Liang
Tung, Chi-Hong
Kao, Ching-Fen
Chang, Calvin C.
ADVANCED CHARACTERIZATION TECHNIQUES FOR OPTICS, SEMICONDUCTORS, AND NANOTECHNOLOGIES III, 2007, 6672
[7] White-Light Interferometer with Partial Correlogram Scanning
Sysoev, E. V.
OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING, 2007, 43 (01) : 83 - 89
[8] White-light interferometer without mechanical scanning
Pavlicek, Pavel
Mikeska, Erik
OPTICS AND LASERS IN ENGINEERING, 2020, 124
[9] Nanodisplacement measurement using spectral shifts in a white-light interferometer
Brundavanam, Maruthi M.
Viswanathan, Nirmal K.
Rao, D. Narayana
APPLIED OPTICS, 2008, 47 (34) : 6334 - 6339
[10] Measuring intermodal dispersion in optical fibres using white-light spectral interferometry with the compensated Michelson interferometer
Hlubina, P
JOURNAL OF MODERN OPTICS, 2001, 48 (14) : 2087 - 2096

← 1 2 3 4 5 →