Gas source molecular-beam epitaxy growth of GaN/GaP superlattices and GaN layers on GaP(111)A substrates

被引:1
|
作者
Ohnishi, K [1 ]
Tampo, H [1 ]
Imanishi, Y [1 ]
Yamada, K [1 ]
Asami, K [1 ]
Asahi, H [1 ]
机构
[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki 5670047, Japan
基金
日本学术振兴会;
关键词
molecular beam epitaxy; nitrides; semiconducting III-V materials;
D O I
10.1016/S0022-0248(02)01524-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN/GaP short-period superlattices were grown on GaP(111)A substrates by gas source molecular-beam epitaxy. Despite the large lattice-mismatch between GaN and GaP, reflection high-energy electron diffraction patterns showed the quick switch from GaN (GaP) streaks to GaP (GaN) streaks just after the corresponding switch of the growth. This indicates two-dimensional layer-by-layer growth resulting from the relaxation of lattice strain at the initial stage of the hetero-epitaxy. This phenomenon is considered to be due to the use of (111)A-oriented substrates. Bulk GaN layers were also grown on GaP(111)A substrates and the flat-surface GaN layers were obtained because of the two-dimensional layer-by-layer growth starting from the interface between GaN and GaP (111)A substrates. Strong near-band-edge photoluminescence with very weak deep-level emission was observed. GaP(111)A substrate is considered to be promising for the growth of GaN. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:283 / 287
页数:5
相关论文
共 50 条
  • [31] The initiation of GaN growth by molecular beam epitaxy on GaN composite substrates
    Cheng, TS
    Novikov, SV
    Lebedev, VB
    Campion, RP
    Jeffs, NJ
    Melnik, YV
    Tsvetkov, DV
    Stepanov, SI
    Cherenkov, AE
    Dmitriev, VA
    Korakakis, D
    Hughes, OH
    Foxon, CT
    JOURNAL OF CRYSTAL GROWTH, 1999, 197 (1-2) : 12 - 18
  • [32] Implantation of As in GaN epitaxial layers during molecular-beam epitaxy
    Ber, BY
    Merkulov, AV
    Novikov, SV
    Tretyakov, VV
    Cheng, TS
    Foxon, CT
    Jenkins, LC
    Hooper, SE
    Lacklison, DE
    Orton, JW
    SEMICONDUCTORS, 1996, 30 (03) : 293 - 296
  • [33] Growth of GaN on Ge(111) by molecular beam epitaxy
    Lieten, R. R.
    Degroote, S.
    Cheng, K.
    Leys, M.
    Kuijk, M.
    Borghs, G.
    APPLIED PHYSICS LETTERS, 2006, 89 (25)
  • [34] Epitaxial growth of GaAs and GaN by gas source molecular beam epitaxy
    Misawa, Shunji
    Okumura, Hajime
    Sakuma, Eiichiro
    Yoshida, Sadafumi
    Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, 1992, 56 (01): : 105 - 113
  • [35] Structural study of GaN(As,P) layers grown on (0001) GaN by gas source molecular beam epitaxy
    Seong, TY
    Bae, IT
    Zhao, Y
    Tu, CW
    MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 1999, 4 : art. no. - G3.11
  • [36] Photoelectric Properties of GaN Layers Grown by Plasma-Assisted Molecular-Beam Epitaxy on Si(111) Substrates and SiC/Si(111) Epitaxial Layers
    Kukushkin, S. A.
    Mizerov, A. M.
    Grashchenko, A. S.
    Osipov, A. V.
    Nikitina, E. V.
    Timoshnev, S. N.
    Bouravlev, A. D.
    Sobolev, M. S.
    SEMICONDUCTORS, 2019, 53 (02) : 180 - 187
  • [37] Homoepitaxial growth of cubic GaN by hydride vapor phase epitaxy on cubic GaN/GaAs substrates prepared with gas source molecular beam epitaxy
    Tsuchiya, Harutoshi
    Okahisa, Takuji
    Hasegawa, Fumio
    Okumura, Hajime
    Yoshida, Sadafumi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (4 A): : 1747 - 1752
  • [38] Growth of GaN and related materials by gas-source molecular-beam epitaxy using uncracked ammonia gas
    Yoshida, S
    JOURNAL OF CRYSTAL GROWTH, 2002, 237 (1-4 II) : 978 - 982
  • [39] Photoelectric Properties of GaN Layers Grown by Plasma-Assisted Molecular-Beam Epitaxy on Si(111) Substrates and SiC/Si(111) Epitaxial Layers
    S. A. Kukushkin
    A. M. Mizerov
    A. S. Grashchenko
    A. V. Osipov
    E. V. Nikitina
    S. N. Timoshnev
    A. D. Bouravlev
    M. S. Sobolev
    Semiconductors, 2019, 53 : 180 - 187
  • [40] EPITAXIAL-GROWTH OF CUBIC AND HEXAGONAL GAN ON GAAS BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    OKUMURA, H
    MISAWA, S
    YOSHIDA, S
    APPLIED PHYSICS LETTERS, 1991, 59 (09) : 1058 - 1060