Detection of Volatile Organic Compunds by High-Q Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonator Arrays

被引：0

作者：

Zhao, Yuan ^{[1
]}

Yang, Qingrui ^{[1
]}

Chang, Ye ^{[1
]}

Zhang, Rui ^{[1
]}

Tao, Jin ^{[1
]}

Qu, Hemi ^{[1
]}

Duan, Xuexin ^{[1
]}

机构：

[1] Tianjin Univ, Coll Precis Instruments & Optoelect Engn, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

2016 IEEE SENSORS | 2016年

关键词：

Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonator Arrays; VOCs; SAMs; Electronic Nose; SENSORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The different sensitivities of the PSBARs to VOCs are utilized to constitute unique identification codes for IPA, ethanol, hexane and heptane detections, and successfully realizing discriminations of different VOCs. Besides, ethanol vapor with concentration as low as 50 ppm has been successfully measured by SAM modified PSBAR.

引用

页数：3

共 50 条

[41] Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays
Wang, Zilun
Zhao, Zeyu
Jin, Suhan
Bian, Feilong
Chang, Ye
Duan, Xuexin
Men, Xiangdong
You, Rui
MICROSYSTEMS & NANOENGINEERING, 2024, 10 (01):
[42] High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection
Lu, J.
Ikehara, T.
Zhang, Y.
Mihara, T.
Itoh, T.
Maeda, R.
MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 665 - +
[43] Simultaneous high-Q confinement and selective direct piezoelectric excitation of flexural and extensional lateral vibrations in a silicon phononic crystal slab resonator
Mohammadi, Saeed
Eftekhar, Ali A.
Pourabolghasem, Reza
Adibi, Ali
SENSORS AND ACTUATORS A-PHYSICAL, 2011, 167 (02) : 524 - 530
[44] Transient chaos in single crystal ferromagnetic membranes magneto-elastically driven by high-Q acoustic cavity modes
Vlasov, V. S.
Golov, A. V.
Pleshev, D. A.
Kotov, L. N.
Temnov, V. V.
JOURNAL OF APPLIED PHYSICS, 2025, 137 (13)
[45] High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter
Wei, P
Hao, Z
Kim, JJ
Yu, HY
Kim, ES
2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, : 413 - 416
[46] High frequency thickness expansion mode bulk acoustic wave resonator using LN single crystal thin plate
Matsumoto, Kohei
Kadota, Michio
Tanaka, Shuji
JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59 (03)
[47] HIGH-Q, 3KHZ SINGLE-CRYSTAL-SILICON CYLINDRICAL RATE-INTEGRATING GYRO (CING)
Cho, J.
Gregory, J. A.
Najafi, K.
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
[48] Direct measurement of forces on superconducting vortices using high-Q single-crystal-silicon double-torsional oscillators
Markert, JT
Mochizuki, K
Judge, EE
PHYSICA B, 2000, 284 : 723 - 724
[49] Chiral Hybrid Perovskite Single-Crystal Nanowire Arrays for High-Performance Circularly Polarized Light Detection
Liu, Zhen
Zhang, Chunhuan
Liu, Xiaolong
Ren, Ang
Zhou, Zhonghao
Qiao, Chan
Guan, Yuwei
Fan, Yuqing
Hu, Fengqin
Zhao, Yong Sheng
ADVANCED SCIENCE, 2021, 8 (21)
[50] CHARACTERIZATION OF A HIGH-Q IN-LIQUID LONGITUDINAL-MODE FILM BULK ACOUSTIC RESONATOR FOR REAL-TIME IN-SITU MONITORING OF COMPETITIVE PROTEIN ADSORPTION
Choi, Seokheun
Xu, Wencheng
Zhang, Xu
Chae, Junseok
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, : 739 - 742

← 1 2 3 4 5 →