Detection of Volatile Organic Compunds by High-Q Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonator Arrays

被引：0

作者：

Zhao, Yuan ^{[1
]}

Yang, Qingrui ^{[1
]}

Chang, Ye ^{[1
]}

Zhang, Rui ^{[1
]}

Tao, Jin ^{[1
]}

Qu, Hemi ^{[1
]}

Duan, Xuexin ^{[1
]}

机构：

[1] Tianjin Univ, Coll Precis Instruments & Optoelect Engn, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

2016 IEEE SENSORS | 2016年

关键词：

Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonator Arrays; VOCs; SAMs; Electronic Nose; SENSORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The different sensitivities of the PSBARs to VOCs are utilized to constitute unique identification codes for IPA, ethanol, hexane and heptane detections, and successfully realizing discriminations of different VOCs. Besides, ethanol vapor with concentration as low as 50 ppm has been successfully measured by SAM modified PSBAR.

引用

页数：3

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