Vibration characteristic identification by experiment of a new disc-type ultrasonic stator

被引：1

作者：

Juang, PA ^{[1
]}

Brenner, W ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Micro Tech & Precis Engn, Vienna, Austria

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 05期

关键词：

D O I：

10.1088/0960-1317/12/5/313

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The objective of this paper is to gain a deeper understanding of the vibration characteristics on the surface of a new disc-type ultrasonic stator for possible application to a moving object. By using the laser heterodyne technique, we can identify the vibration displacement and velocity patterns of the stator. Furthermore, the sensitivity is acquired from the measurement data. As a result, we find that the stator can produce a levitation motion oil the surface of the stator. However, this is better for a lateral motion than a planar levitation.

引用

页码：598 / 603

页数：6

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