Vibration characteristic identification by experiment of a new disc-type ultrasonic stator

被引:1
|
作者
Juang, PA [1 ]
Brenner, W [1 ]
机构
[1] Vienna Univ Technol, Inst Micro Tech & Precis Engn, Vienna, Austria
关键词
D O I
10.1088/0960-1317/12/5/313
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The objective of this paper is to gain a deeper understanding of the vibration characteristics on the surface of a new disc-type ultrasonic stator for possible application to a moving object. By using the laser heterodyne technique, we can identify the vibration displacement and velocity patterns of the stator. Furthermore, the sensitivity is acquired from the measurement data. As a result, we find that the stator can produce a levitation motion oil the surface of the stator. However, this is better for a lateral motion than a planar levitation.
引用
收藏
页码:598 / 603
页数:6
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