Influence of ambient gas on formation process of Si nanoparticles by laser ablation

被引:21
|
作者
Muramoto, J [1 ]
Inmaru, T [1 ]
Nakata, Y [1 ]
Okada, T [1 ]
Maeda, M [1 ]
机构
[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka 8128581, Japan
来源
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D O I
10.1007/s003399900224
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We described the influence of a type of gas and its pressure upon the size distribution of Si nanoparticles fabricated by laser ablation in an ambient gas and the plume dynamics during the synthesis. The plume dynamics was investigated by laser-induced fluorescence anti ultraviolet Rayleigh scattering. Based on the results, the importance of the gas flow within the ablation plume in the formation of the nanoparticles is understood.
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页码:S239 / S241
页数:3
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