Low-Frequency Noise in Amorphous Indium Zinc Oxide Thin Film Transistors with Aluminum Oxide Gate Insulator

被引:3
|
作者
Chen, Ya-Yi [1 ,2 ]
Liu, Yuan [2 ]
Wu, Zhao-Hui [1 ]
Wang, Li [1 ]
Li, Bin [1 ]
En, Yun-Fei [2 ]
Chen, Yi-Qiang [2 ]
机构
[1] South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China
[2] China Elect Produce Reliabil & Environm Testing R, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
SILICON; DENSITY; TFTS;
D O I
10.1088/0256-307X/35/4/048502
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Low-frequency noise (LFN) in all operation regions of amorphous indium zinc oxide (a-IZO) thin film transistors (TFTs) with an aluminum oxide gate insulator is investigated. Based on the LFN measured results, we extract the distribution of localized states in the band gap and the spatial distribution of border traps in the gate dielectric, and study the dependence of measured noise on the characteristic temperature of localized states for a-IZO TFTs with Al2O3 gate dielectric. Further study on the LFN measured results shows that the gate voltage dependent noise data closely obey the mobility fluctuation model, and the average Hooge's parameter is about 1.18 x 10(-3). Considering the relationship between the free carrier number and the field effect mobility, we simulate the LFN using the Delta N-Delta mu, model, and the total trap density near the IZO/oxide interface is about 1.23 x 10(18) cm(-3) eV(-1).
引用
收藏
页数:4
相关论文
共 50 条
  • [41] The influence of the gate dielectrics on threshold voltage instability in amorphous indium-gallium-zinc oxide thin film transistors
    Lee, Jaeseob
    Park, Jin-Seong
    Pyo, Young Shin
    Lee, Dong Bum
    Kim, Eun Hyun
    Stryakhilev, Denis
    Kim, Tae Woong
    Jin, Dong Un
    Mo, Yeon-Gon
    APPLIED PHYSICS LETTERS, 2009, 95 (12)
  • [42] Zirconium oxide-aluminum oxide nanolaminate gate dielectrics for amorphous oxide semiconductor thin-film transistors
    Waggoner, T.
    Triska, J.
    Hoshino, K.
    Wager, J. F.
    Conley, J. F., Jr.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2011, 29 (04):
  • [43] Low-frequency noise in InSnZnO thin film transistors with high-quality SiO2 gate oxide stacks
    Chen, Yayi
    Liu, Yuan
    Deng, Sunbin
    Chen, Rongsheng
    Zhang, Jianfeng
    Kwok, Hoi-Sing
    Zhong, Wei
    APPLIED PHYSICS LETTERS, 2024, 124 (02)
  • [44] Effect of magnesium oxide passivation on the performance of amorphous indium-gallium-zinc-oxide thin film transistors
    Yoo, Dong Youn
    Chong, Eugene
    Kim, Do Hyung
    Ju, Byeong Kwon
    Lee, Sang Yeol
    THIN SOLID FILMS, 2012, 520 (10) : 3783 - 3786
  • [45] Modification of a polymer gate insulator by zirconium oxide doping for low temperature, high performance indium zinc oxide transistors
    Son, Byeong-Geun
    Je, So Yeon
    Kim, Hyo Jin
    Jeong, Jae Kyeong
    RSC ADVANCES, 2014, 4 (86) : 45742 - 45748
  • [46] Preparation of Aluminum Oxide Layer for Gate Insulator Application in Organic Thin-Film Transistors
    Lee, Jong Won
    Park, Jaehoon
    Kim, Dong Wook
    Noh, Jung Chul
    Choi, Jong Sun
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2010, 519 : 187 - 191
  • [47] Low frequency noise in amorphous silicon thin film transistors with SiNx gate dielectric
    Rumyantsev, S. L.
    Jin, Sung Hun
    Shur, M. S.
    Park, Mun-Soo
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (12)
  • [48] Amorphous structure and electrical performance of low-temperature annealed amorphous indium zinc oxide transparent thin film transistors
    Lee, Sunghwan
    Bierig, Brian
    Paine, David C.
    THIN SOLID FILMS, 2012, 520 (10) : 3764 - 3768
  • [49] Solution-processed amorphous hafnium-lanthanum oxide gate insulator for oxide thin-film transistors
    Ko, Jieun
    Kim, Joohee
    Park, Si Yun
    Lee, Eungkyu
    Kim, Kyongjun
    Lim, Keon-Hee
    Kim, Youn Sang
    JOURNAL OF MATERIALS CHEMISTRY C, 2014, 2 (06) : 1050 - 1056
  • [50] Instability of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors under Light Illumination
    Gosain, Dharam Pal
    Tanaka, Tsutomu
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (03)