Low-Frequency Noise in Amorphous Indium Zinc Oxide Thin Film Transistors with Aluminum Oxide Gate Insulator

被引:3
|
作者
Chen, Ya-Yi [1 ,2 ]
Liu, Yuan [2 ]
Wu, Zhao-Hui [1 ]
Wang, Li [1 ]
Li, Bin [1 ]
En, Yun-Fei [2 ]
Chen, Yi-Qiang [2 ]
机构
[1] South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China
[2] China Elect Produce Reliabil & Environm Testing R, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
SILICON; DENSITY; TFTS;
D O I
10.1088/0256-307X/35/4/048502
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Low-frequency noise (LFN) in all operation regions of amorphous indium zinc oxide (a-IZO) thin film transistors (TFTs) with an aluminum oxide gate insulator is investigated. Based on the LFN measured results, we extract the distribution of localized states in the band gap and the spatial distribution of border traps in the gate dielectric, and study the dependence of measured noise on the characteristic temperature of localized states for a-IZO TFTs with Al2O3 gate dielectric. Further study on the LFN measured results shows that the gate voltage dependent noise data closely obey the mobility fluctuation model, and the average Hooge's parameter is about 1.18 x 10(-3). Considering the relationship between the free carrier number and the field effect mobility, we simulate the LFN using the Delta N-Delta mu, model, and the total trap density near the IZO/oxide interface is about 1.23 x 10(18) cm(-3) eV(-1).
引用
收藏
页数:4
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