Structural and optical properties of beta-FeSi2/Si(100) prepared by laser ablation method

被引:7
|
作者
Kakemoto, H
Makita, Y
Obara, A
Tsai, Y
Sakuragi, S
Ando, S
Tsukamoto, T
机构
关键词
D O I
10.1557/PROC-478-273
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
beta-FeSi2 is a promising material for the application of various electronic, optoelectronic and energy devices. We present here the semiconducting properties of beta-FeSi2 films on Si(100) substrate prepared by laser ablation method. Samples were grown using poly-crystalline bulk beta-FeSi2 prepared by horizontal gradient freeze method. For the monitoring of growth, in-situ observation of ablation plume was made through fluorescence spectroscopy. Reflection of high energy electron beam diffraction (RHEED) was also made in-situ to see the surface morphology. Characterization of the films by X-ray diffraction presented purely beta(220) orientation. Raman scattering measurements at room temperature also indicated that the grown films are semiconducting beta-FeSi2. Optical absorption spectra at room temperature showed absorption coefficient higher than 10(5) cm(-1) above the band-gap (similar to 1.2 eV). It was revealed that high quality semiconducting beta-FeSi2 films can be fabricated by laser ablation method without post-annealing.
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页码:273 / 278
页数:6
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