共 49 条
- [22] Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (02):
- [23] Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology Electronic Materials Letters, 2020, 16 : 604 - 614
- [26] Focusing properties of X-ray polymer refractive lenses from SU-8 resist layer CRYSTALS, MULTILAYERS, AND OTHER SYNCHROTRON OPTICS, 2003, 5195 : 21 - 31
- [28] Thermo-mechanical and tribological properties of SU-8/h-BN composite with SN150/perfluoropolyether filler Friction, 2020, 8 : 151 - 163
- [30] SU8-Based micro neural probe for enhanced chronic in-vivo recording of spike signals from regenerated axons 2006 IEEE SENSORS, VOLS 1-3, 2006, : 66 - +