Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

被引：45
|
作者：
Oralkan, Ö [1 ]
Jin, XC [1 ]
Degertekin, FL [1 ]
Khuri-Yakub, BT [1 ]
机构：
[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1999年 / 46卷 / 06期
关键词：
D O I：
10.1109/58.808855
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this letter, a 400-mu m x 400-mu m 2-D capacitive micromachined ultrasonic transducer (cMUT) array element is experimentally characterized, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8 X 10(-7) nm/root Hz displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging.
引用
收藏
页码：1337 / 1340
页数：4
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