Optical properties of MgxZn1-xO thin films deposited on silicon and sapphire substrate by rf magnetron sputtering

被引：4
|
作者：
Guan, W. L. [1 ]
Lian, J. [2 ]
Yu, Y. X. [1 ]
Sun, Z. Z. [2 ]
Zhao, M. L. [2 ]
Wang, X. [2 ]
Zhang, W. F. [2 ]
机构：
[1] Qilu Normal Univ, Dept Phys, Jinan 250013, Shandong, Peoples R China
[2] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Shandong, Peoples R China
来源：
OPTIK | 2014年 / 125卷 / 18期
关键词：
Semiconductors; MgxZn1-xO films; Optical properties; SPECTROSCOPIC ELLIPSOMETRY; REFRACTIVE-INDEXES; EPITAXIAL-GROWTH; ZINC-OXIDE; ZNO; PHOTOLUMINESCENCE; LUMINESCENCE; EMISSION; DEFECTS;
D O I：
10.1016/j.ijleo.2014.06.007
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The index dispersion at UV-VIS range for polycrystalline MgxZn1-xO films on silicon with different Mg concentration was obtained by spectroscopic ellipsometry (SE) method. It decreases with the increase of the Mg content. Above the relative peak wavelength, they are well fitted by the first-order Sellmeier relation. The band gap of films on sapphire of different Mg content was determined from transmission measurements. Photoluminescence (PL) illustrated that for MgxZn1-xO films every PL peak corresponded to a special excitation wavelength. The wavelength of the PL peak was proportional to the special excitation wavelength. A strong peak was obtained in the blue band for the films due to the large amount of oxygen vacancies caused by excess Zn and Mg atoms, while weak peak at ultraviolet band. (C) 2014 Elsevier GmbH. All rights reserved.
引用
收藏
页码：5167 / 5170
页数：4
相关论文
共 50 条
  • [21] Structure properties of MgxZn1-xO films deposited at low temperature
    Zhang, XJ
    Ma, HL
    Wang, QP
    Ma, J
    Zong, FJ
    Xiao, HD
    Ji, F
    CHINESE PHYSICS LETTERS, 2005, 22 (04) : 995 - 997
  • [22] Cubic phase MgxZn1-xO thin films for optical waveguides
    Yu, P.
    Wu, H. Z.
    Xu, T. N.
    Qiu, D. J.
    Hu, G. J.
    Dai, N.
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (02) : 336 - 340
  • [23] The effect of growth ambient on the structural and optical properties of MgxZn1-xO thin films
    Ghosh, R.
    Basak, D.
    APPLIED SURFACE SCIENCE, 2009, 255 (16) : 7238 - 7242
  • [24] Structure properties of MgxZn1-xO films
    Zhang, Xi-Jian
    Ma, Hong-Lei
    Wang, Qing-Pu
    Ma, Jin
    Wuji Cailiao Xuebao/Journal of Inorganic Materials, 2006, 21 (01): : 235 - 238
  • [25] Influence of substrate temperature on the optical and piezoelectric properties of ZnO thin films deposited by rf magnetron sputtering
    Kang, Seong Jun
    Joung, Yang Hee
    APPLIED SURFACE SCIENCE, 2007, 253 (17) : 7330 - 7335
  • [26] Properties of MgxZn1-xO thin films sputtered in different gases
    Jiang, Da-Yong
    Zhang, Ji-Ying
    Liu, Ke-Wei
    Shan, Chong-Xin
    Zhao, Yan-Min
    Yang, Tong
    Yao, Bin
    Lu, You-Ming
    Shen, De-Zhen
    APPLIED SURFACE SCIENCE, 2008, 254 (07) : 2146 - 2149
  • [27] Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering
    Zhu, Y
    Gu, PF
    Ye, H
    Shen, WD
    MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS II, 2004, 5641 : 124 - 129
  • [28] Structure properties of MgxZn1-xO films
    Zhang, XJ
    Ma, HL
    Wang, QP
    Ma, J
    JOURNAL OF INORGANIC MATERIALS, 2006, 21 (01) : 235 - 238
  • [29] Dependence of structural, optical and electrical properties on substrate temperature for hexagonal MgxZn1-xO films
    Gu, Xiuquan
    Wang, Bo
    Zhao, Yulong
    Qiang, Yinghuai
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2013, 24 (03) : 884 - 888
  • [30] Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering
    Dong Hyun Hwang
    Jung Hoon Ahn
    Kwun Nam Hui
    Kwan San Hui
    Young Guk Son
    Nanoscale Research Letters, 7
12345