Charging effects in electrostatically-actuated membrane devices

被引：4

作者：

Goossen, KW ^{[1
]}

Walker, JA ^{[1
]}

Ford, JE ^{[1
]}

机构：

[1] Bell Labs, Lucent Technol, Holmdel, NJ 07733 USA

来源：

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS | 1999年 / 3878卷

关键词：

D O I：

10.1117/12.361287

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have observed the effects of electrical charging in the Mechanical Anti-Reflection Switch (MARS) device for some time. The MARS device has an membrane that is pulled toward the substrate by application of an electrical bias, and thereby produces optical modulation. Under constant bias MARS devices with insulating membranes exhibit a slow (minutes to hours) change in air gap. We have now determined that this is due to ionization in the air gap, and that the effect can be greatly reduced by placing the device in an argon atmosphere. It is postulated that the effect is due to the formation of a space charge region in the air gap adjacent to the membrane.

引用

页码：407 / 415

页数：9

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