Stabilization of electrostatically actuated mechanical devices

被引：0
|
作者：
Seeger, JI
Crary, SB
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
electrostatics stability control;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We show that the pull-in instability, which significantly limits the operation of electrostatically actuated devices, can be avoided by the simple addition of a series capacitance.
引用
收藏
页码：1133 / 1136
页数：4
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