Stabilization of electrostatically actuated mechanical devices

被引：0

作者：

Seeger, JI

Crary, SB

机构：

来源：

TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年

关键词：

electrostatics stability control;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We show that the pull-in instability, which significantly limits the operation of electrostatically actuated devices, can be avoided by the simple addition of a series capacitance.

引用

页码：1133 / 1136

页数：4

共 50 条

[21] Real time optical correction using electrostatically actuated MEMS devices
Horenstein, M
Bifano, T
Pappas, S
Perreault, J
Krishnamoorthy-Mali, R
JOURNAL OF ELECTROSTATICS, 1999, 46 (2-3) : 91 - 101
[22] On electrostatically actuated microsensors
Caruntu, Dumitru I.
Knecht, Martin W.
SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE SYSTEMS 2010, 2010, 7647
[23] Wavelength stabilization of electrostatically actuated micromechanical infrared Fabry-Perot filters
Schroeter, Joerg R.
Lehmann, Sebastian
Ebermann, Martin
Neumann, Norbert
INFRARED SENSORS, DEVICES, AND APPLICATIONS III, 2013, 8868
[24] AN EXPERIMENTAL AND THEORETICAL INVESTIGATION OF DYNAMIC PULL-IN IN MEMS DEVICES ACTUATED ELECTROSTATICALLY
Alsaleem, Fadi M.
Younis, Mohammad I.
DETC2009: PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES/COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2010, : 583 - 595
[25] Electrostatically actuated micromechanical switches
Majumder, S
McGruer, NE
Zavracky, PM
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1246 - 1249
[26] ELECTROSTATICALLY ACTUATED COMPLIANT MICROVALVE
Dankovic, Tatjana
Feinerman, Alan
INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 721 - 729
[27] Electrostatically actuated window blinds
Kiefer, SF
Silverberg, LM
Gonzalez, ML
JOURNAL OF ELECTROSTATICS, 2001, 50 (04) : 229 - 248
[28] Electrostatically actuated micromechanical switches
Majumder, S.
McGruer, N.E.
Zavracky, P.M.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997, 15 (3 Pt 1):
[29] Electrostatically actuated polymer microresonators
Zhang, G
Gaspar, J
Chu, V
Conde, JP
APPLIED PHYSICS LETTERS, 2005, 87 (10)
[30] Electrostatically actuated encased cantilevers
Desbiolles, Benoit X. E.
Furlan, Gabriela
Schwartzberg, Adam M.
Ashby, Paul D.
Ziegler, Dominik
BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2018, 9 : 1381 - 1389

← 1 2 3 4 5 →