Design and Structure of a Novel 3-DOF Micro-CMM

被引：0

作者：

Rugbani, Ali ^{[1
]}

Schreve, Kristiaan ^{[1
]}

机构：

[1] Univ Stellenbosch, Dept Mech & Mechatron Engn, ZA-7600 Stellenbosch, South Africa

来源：

INTERNATIONAL CONFERENCE ON MECHANICAL DESIGN, MANUFACTURE AND AUTOMATION ENGINEERING (MDMAE 2014) | 2014年

关键词：

Micro-CMM; Kinematic modeling; Precision measurement;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A novel micro coordinate measurement machine (micro-CMM) is introduced, to be used with high precision and high accuracy measurement of part dimensions in micron scale. This design considers eliminating Abbe error, and is intended to achieve submicron accuracy for a work envelope of at least (100x100x100) mm. In this study, a prototype of the new micro-CMM was built, a mathematical measuring model to explicitly define the coordinate of the probe in x, y and z directions have been derived.

引用

页码：88 / 92

页数：5

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