Design and Structure of a Novel 3-DOF Micro-CMM

被引:0
|
作者
Rugbani, Ali [1 ]
Schreve, Kristiaan [1 ]
机构
[1] Univ Stellenbosch, Dept Mech & Mechatron Engn, ZA-7600 Stellenbosch, South Africa
关键词
Micro-CMM; Kinematic modeling; Precision measurement;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A novel micro coordinate measurement machine (micro-CMM) is introduced, to be used with high precision and high accuracy measurement of part dimensions in micron scale. This design considers eliminating Abbe error, and is intended to achieve submicron accuracy for a work envelope of at least (100x100x100) mm. In this study, a prototype of the new micro-CMM was built, a mathematical measuring model to explicitly define the coordinate of the probe in x, y and z directions have been derived.
引用
收藏
页码:88 / 92
页数:5
相关论文
共 50 条
  • [31] Design optimization of a compact 3-DOF parallel micro/nano finger manipulator
    Ramadan, Ahmed A.
    Inoue, Kenji
    Arai, Tatsuo
    Takubo, Tomohito
    2006 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-12, 2006, : 778 - +
  • [32] Optimum design considerations for a 3-DOF micro accelerometer using nanoscale piezoresistors
    Tran, Tan D.
    Dao, Dzung V.
    Bui, Tung T.
    Nguyen, Long T.
    Nguyen, Thuy P.
    Susumu, Sugiyama
    2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 770 - 773
  • [33] Ultraprecision micro-CMM using a low force 3D touch probe
    Kueng, A.
    Meli, F.
    Thalmann, R.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (02) : 319 - 327
  • [34] Design and Analysis of a Novel 3-DOF Large Range Micropositioning Mechanism
    Al-Jodah, Ammar
    Shirinzadeh, Bijan
    Ghafarian, Mohammadali
    Tian, Yanling
    Clark, Leon
    2018 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2018, : 991 - 996
  • [35] A Novel 3-Dof Electronic-driven Balanced Structure Model
    Peng, Hao
    Fan, Haitao
    Qiu, Jinghuai
    Weng, Tianxiang
    Zhang, Xueke
    Yu, Jie
    Zhao, Zhongwei
    PROCEEDINGS OF THE 2016 6TH INTERNATIONAL CONFERENCE ON MECHATRONICS, COMPUTER AND EDUCATION INFORMATIONIZATION (MCEI 2016), 2016, 130 : 1205 - 1210
  • [36] Kinematic design of a novel 3-DOF compliant parallel manipulator for nanomanipulation
    Li, YM
    Xu, QS
    2005 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS, VOLS 1 AND 2, 2005, : 93 - 98
  • [37] FORCE ANALYSIS AND MECHANICAL DESIGN OF A NOVEL 3-DOF PARALLEL MECHANISM
    Zhang, Dongsheng
    Xu, Yundou
    Yao, Jiantao
    Zhou, Yulin
    Zhao, Yongsheng
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2018, VOL 5B, 2018,
  • [38] Design and control of a novel 3-DOF parallel MFC micromanipulation platform
    Yu, Zi-xuan
    Huangfu, Le-xiao
    Yang, Yi-ling
    Wang, Shun-shun
    Wu, Gao-hua
    Cui, Yu-guo
    ENGINEERING SCIENCE AND TECHNOLOGY-AN INTERNATIONAL JOURNAL-JESTECH, 2025, 61
  • [39] Study on the theory and the virtual prototype of 3-DOF parallel-link CMM
    Liu, Dejun
    Che, Rensheng
    Yang, Yuguo
    Sun, Yuqin
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2000, 11 (03): : 252 - 254
  • [40] Design and analysis of a novel flexure-based 3-DOF mechanism
    Bhagat, Umesh
    Shirinzadeh, Bijan
    Clark, Leon
    Chea, Peter
    Qin, Yanding
    Tian, Yanling
    Zhang, Dawei
    MECHANISM AND MACHINE THEORY, 2014, 74 : 173 - 187