Some numerical models of dispersion curve fitting

被引：0
|
作者：
Vlcek, J [1 ]
Pistora, J [1 ]
机构：
[1] Tech Univ Ostrava, Dept Math, VSB, Ostrava 70833, Czech Republic
来源：
MICROWAVE AND OPTICAL TECHNOLOGY 2003 | 2003年 / 5445卷
关键词：
spectral ellipsometry; binary gratings; curve fitting;
D O I：
10.1117/12.560128
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The parameters of two dispersion models for Si3N4 dots of multilayer 2D grating are established by the fitting procedures. The Gauss-Newton and Leven berg-M arquardt fitting algorithms are compared. Spectral ellipsometric measurements as the resource of experimental data are reported. In the objective function, various weighting coefficients corresponding to ellipsometric angles are tested.
引用
收藏
页码：230 / 234
页数：5
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