Some numerical models of dispersion curve fitting

被引：0
|
作者：
Vlcek, J [1 ]
Pistora, J [1 ]
机构：
[1] Tech Univ Ostrava, Dept Math, VSB, Ostrava 70833, Czech Republic
来源：
MICROWAVE AND OPTICAL TECHNOLOGY 2003 | 2003年 / 5445卷
关键词：
spectral ellipsometry; binary gratings; curve fitting;
D O I：
10.1117/12.560128
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The parameters of two dispersion models for Si3N4 dots of multilayer 2D grating are established by the fitting procedures. The Gauss-Newton and Leven berg-M arquardt fitting algorithms are compared. Spectral ellipsometric measurements as the resource of experimental data are reported. In the objective function, various weighting coefficients corresponding to ellipsometric angles are tested.
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页码：230 / 234
页数：5
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