共 50 条
- [22] NEGATIVE PHOTORESISTS FOR DEEP-UV LITHOGRAPHY PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 469 : 117 - 126
- [24] Deep-UV standoff Raman spectroscopy NEXT-GENERATION SPECTROSCOPIC TECHNOLOGIES XII, 2019, 10983
- [27] MATERIALS AND PROCESSES FOR DEEP-UV LITHOGRAPHY ADVANCES IN CHEMISTRY SERIES, 1988, (218): : 109 - 224
- [28] Deep-UV immersion interferometric lithography OPTICAL MICROLITHOGRAPHY XVII, PTS 1-3, 2004, 5377 : 306 - 318
- [30] Deep-UV harmonic generation and applications 2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9, 2008, : 1125 - +