Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam

被引：4

作者：

Miura, Kenta ^{[1
]}

Kiryu, Hiromu ^{[2
]}

Ozawa, Yusuke ^{[2
]}

Kubota, Atsushi ^{[2
]}

Hiratani, Yuji ^{[3
]}

Hanaizumi, Osamu ^{[1
]}

Satoh, Takahiro

Ishii, Yasuyuki

Kohka, Masashi

Takano, Katsuyoshi ^{[5
]}

Ohkubo, Takeru ^{[4
]}

Yamazaki, Akiyoshi ^{[4
]}

Kada, Wataru ^{[1
]}

Yokoyama, Akihito ^{[4
]}

Kamiya, Tomihiro ^{[4
]}

机构：

[1] Gunma Univ, Fac Sci & Technol, 1-5-1 Tenjin Cho, Kiryu, Gunma 3768515, Japan

[2] Gunma Univ, Grad Sch Engn, Kiryu, Gunma 3768515, Japan

[3] Hiroshima Int Univ, Fac Engn, Tokyo, Japan

[4] Takasaki Adv Radiat Res Inst, JapanAtom Energy Agcy, Tokyo, Japan

[5] Osaka Univ, Grad Sch Engn, Suita, Osaka 565, Japan

来源：

ADVANCED MICRO-DEVICE ENGINEERING IV | 2014年 / 596卷

关键词：

proton beam writing; PMMA; Mach-Zehnder waveguide; thermo-optic switch;

D O I：

10.4028/www.scientific.net/KEM.596.134

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at lambda = 1.55 mu m. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 mu m and a branching angle of 2 degrees. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An ON/OFF ratio of 9.0 dB and a switching power of 43.9 mW were obtained from the sample. The switching power is lower than for conventional commercial silica-based switches.

引用

页码：134 / +

页数：2

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