Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam

被引：4

作者：

Miura, Kenta ^{[1
]}

Kiryu, Hiromu ^{[2
]}

Ozawa, Yusuke ^{[2
]}

Kubota, Atsushi ^{[2
]}

Hiratani, Yuji ^{[3
]}

Hanaizumi, Osamu ^{[1
]}

Satoh, Takahiro

Ishii, Yasuyuki

Kohka, Masashi

Takano, Katsuyoshi ^{[5
]}

Ohkubo, Takeru ^{[4
]}

Yamazaki, Akiyoshi ^{[4
]}

Kada, Wataru ^{[1
]}

Yokoyama, Akihito ^{[4
]}

Kamiya, Tomihiro ^{[4
]}

机构：

[1] Gunma Univ, Fac Sci & Technol, 1-5-1 Tenjin Cho, Kiryu, Gunma 3768515, Japan

[2] Gunma Univ, Grad Sch Engn, Kiryu, Gunma 3768515, Japan

[3] Hiroshima Int Univ, Fac Engn, Tokyo, Japan

[4] Takasaki Adv Radiat Res Inst, JapanAtom Energy Agcy, Tokyo, Japan

[5] Osaka Univ, Grad Sch Engn, Suita, Osaka 565, Japan

来源：

ADVANCED MICRO-DEVICE ENGINEERING IV | 2014年 / 596卷

关键词：

proton beam writing; PMMA; Mach-Zehnder waveguide; thermo-optic switch;

D O I：

10.4028/www.scientific.net/KEM.596.134

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at lambda = 1.55 mu m. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 mu m and a branching angle of 2 degrees. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An ON/OFF ratio of 9.0 dB and a switching power of 43.9 mW were obtained from the sample. The switching power is lower than for conventional commercial silica-based switches.

引用

页码：134 / +

页数：2

共 50 条

[21] 1x8 Silicon-Based Thermo-Optic Switch Based on Mach-Zehnder Interferometers
Gao Xiaoyong
Liu Yangyang
Hu Guangxi
Lu Liangjun
Luo Haimei
ACTA OPTICA SINICA, 2024, 44 (08)
[22] Silicon nitride thermo-optic on-chip Mach-Zehnder interferometer at visible wavelengths
Wang, Xiaomin
Ji, Peirui
Li, Shaobo
Wang, Fei
Deng, Huiwen
Yang, Shuming
MEASUREMENT SCIENCE AND TECHNOLOGY, 2024, 35 (05)
[23] High-speed electro-optic switch using buried electrode structure in polymer Mach-Zehnder waveguide
Sun, Jingwen
Sun, Jian
Yi, Yunji
Qv, Lucheng
Sun, Shiqi
Wang, Fei
Wang, Xibin
Zhang, Daming
MODERN PHYSICS LETTERS B, 2016, 30 (06):
[24] 1? 2 mode-independent polymeric thermo-optic switch based on a Mach-Zehnder interferometer with a multimode interferometer
Sun, Shijie
Sun, Xueqing
Lian, Tianhang
Che, Yuanhua
Zhu, Mu
Yu, Qidong
Xie, Yuhang
Wang, Xibin
Zhang, Daming
OPTICS EXPRESS, 2023, 31 (08) : 12049 - 12058
[25] Cost-Effective 2 x 2 Silicon Nitride Mach-Zehnder Interferometric (MZI) Thermo-Optic Switch
Joo, Jiho
Park, Jaegyu
Kim, Gyungock
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 30 (08) : 740 - 743
[26] Silicon thermo-optic variable optical attenuators based on Mach-Zehnder interference structures
Wu, Qianqian
Zhou, Linjie
Sun, Xiaomeng
Zhu, Haike
Lu, Liangjun
Chen, Jianping
OPTICS COMMUNICATIONS, 2015, 341 : 69 - 73
[27] Two-dimensional design and analysis of trench-coupler based Silicon Mach-Zehnder thermo-optic switch
Liu, Ke
Zhang, Chenglong
Mu, Sixuan
Wang, Shuang
Sorger, Volker J.
OPTICS EXPRESS, 2016, 24 (14): : 15845 - 15853
[28] Performance-enhanced silicon thermo-optic Mach-Zehnder switch using laterally supported suspended phase arms and efficient electrodes
Chen, Kai
Duan, Fei
Yu, Yonglin
OPTICS LETTERS, 2019, 44 (04) : 951 - 954
[29] Analysis and demonstration of Mach-Zehnder polymer modulators using in-plane coplanar waveguide structure
Song, Reem
Song, Hyun-Chae
Steier, William H.
Cox, Charles H., III
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2007, 43 (7-8) : 633 - 640
[30] All-optical remotely controllable 1 x 8 silicon thermo-optic switch based on Mach-Zehnder interferometers
Liang, Zhu
Shoji, Yuya
OPTICS EXPRESS, 2025, 33 (03): : 5539 - 5550

← 1 2 3 4 5 →