Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

被引：0
|
作者：
Brunne, Jens [1 ]
Wapler, Matthias [1 ]
Wallrabe, Ulrike [1 ]
Treffer, Alexander [2 ]
Bock, Martin [2 ]
Grunwald, Ruediger [2 ]
机构：
[1] Univ Freiburg, IMTEK, Dept Microsyst Engn, Lab Microactuators, Hugstetter Str 55, D-79106 Freiburg, Germany
[2] Max Born Inst Nonlinear Opt & Short Pulse Spectro, Berlin, Germany
来源：
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT) | 2012年
关键词：
Adaptive Fresnel mirror; nanomachining; femtosecond laser machining; LIPSS; piezoelectric MOEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this contribution we present a fast and robust adaptive Fresnel mirror for advanced nanomachining applications with femtosecond lasers. The Fresnel mirror consists of two mirror segments that are actuated with a piezoelectric bimorph. All components are fabricated by low-cost rapid prototyping processes without the need for a clean-room. Light propagation and pulse transfer have been characterized as well as the static and dynamic actuation properties.
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页数：2
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