Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

被引：0
|
作者：
Brunne, Jens [1 ]
Wapler, Matthias [1 ]
Wallrabe, Ulrike [1 ]
Treffer, Alexander [2 ]
Bock, Martin [2 ]
Grunwald, Ruediger [2 ]
机构：
[1] Univ Freiburg, IMTEK, Dept Microsyst Engn, Lab Microactuators, Hugstetter Str 55, D-79106 Freiburg, Germany
[2] Max Born Inst Nonlinear Opt & Short Pulse Spectro, Berlin, Germany
来源：
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT) | 2012年
关键词：
Adaptive Fresnel mirror; nanomachining; femtosecond laser machining; LIPSS; piezoelectric MOEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this contribution we present a fast and robust adaptive Fresnel mirror for advanced nanomachining applications with femtosecond lasers. The Fresnel mirror consists of two mirror segments that are actuated with a piezoelectric bimorph. All components are fabricated by low-cost rapid prototyping processes without the need for a clean-room. Light propagation and pulse transfer have been characterized as well as the static and dynamic actuation properties.
引用
收藏
页数：2
相关论文
共 50 条
  • [21] Ultrashort-pulse laser ablation of indium phosphide in air
    Bonse, J.
    Wrobel, J.M.
    Kruger, J.
    Kautek, W.
    Applied Physics A: Materials Science and Processing, 2001, 72 (01): : 89 - 94
  • [22] Measurement of ultrashort-pulse cross-polarization scattering in a tandem mirror
    Kogi, Yuichiro
    Mase, Atsushi
    Hojo, Hitoshi
    Itakura, Akiyosi
    Ichimura, Makoto
    Yatsu, Kiyoshi
    2001, Japan Society of Applied Physics (40):
  • [23] Scattering of evaporation particles in ultrashort-pulse laser ablation
    Ohmura, E
    Fukumoto, I
    Miyamoto, I
    SECOND INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2002, 4426 : 66 - 69
  • [24] Ultrashort-pulse laser ablation of indium phosphide in air
    Bonse, J
    Wrobel, JM
    Krüger, J
    Kautek, W
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (01): : 89 - 94
  • [25] Mechanisms of spectral shift in ultrashort-pulse laser oscillators
    Kalashnikov, VL
    Sorokin, E
    Sorokina, IT
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2001, 18 (11) : 1732 - 1741
  • [26] Numerical modeling of ultrashort-pulse laser ablation of silicon
    Korfiatis, D. P.
    Thoma, K. -A. Th.
    Vardaxoglou, J. C.
    APPLIED SURFACE SCIENCE, 2009, 255 (17) : 7605 - 7609
  • [27] Measurement of ultrashort-pulse cross-polarization scattering in a tandem mirror
    Kogi, Y
    Mase, A
    Hojo, H
    Itakura, A
    Ichimura, M
    Yatsu, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2001, 40 (8A): : L841 - L843
  • [28] Optimization of ultrashort-pulse squeezing by spectral filtering with the Fourier pulse-shaping technique
    Takeoka, M
    Fujishima, D
    Kannari, F
    OPTICS LETTERS, 2001, 26 (20) : 1592 - 1594
  • [29] Fast optical line shaper for ultrashort-pulse laser nanomachining
    Brunne, Jens
    Wallrabe, Ulrike
    Treffer, Alexander
    Bock, Martin
    Grunwald, Ruediger
    OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2011, : 5 - +
  • [30] Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
    Fushinobu, K
    Phinney, LM
    Tien, NC
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1996, 39 (15) : 3181 - 3186
12345