FABRICATING A 2D IMAGING DEVICE USING AEROSOL PZT PROCESS

被引：1

作者：

Wang, Wei-Chih ^{[1
,2
,3
,4
]}

Chen, Peng-Jyun ^{[1
]}

Chiang, Yu-Hsin ^{[2
]}

Chen, Chao-Ting ^{[5
]}

Wu, Wen-Jong ^{[5
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan

[3] Univ Washington, Dept Mech Engn, Seattle, WA 98195 USA

[4] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

[5] Natl Taiwan Univ, Engn Sci & Ocean Engn Dept, Taipei, Taiwan

来源：

ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XI | 2018年 / 10544卷

关键词：

Actuator; PZT scanner; Aerosol deposition; 2D Scanner system;

D O I：

10.1117/12.2291353

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Here we present a new rapid prototyped PZT MEMS actuator for potential 2D scanning endoscopic application. The proposed 6.1 mm x 7.1 mm x 5 mu m thick film PZT push-pull actuator made by directly deposited on a thin 100 mu m thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear 2D vibration using 1-D actuation. Initial fabrication results, electrical impedance, mechanical will be presented and discussed.

引用

页数：7

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