FABRICATING A 2D IMAGING DEVICE USING AEROSOL PZT PROCESS

被引：1

作者：

Wang, Wei-Chih ^{[1
,2
,3
,4
]}

Chen, Peng-Jyun ^{[1
]}

Chiang, Yu-Hsin ^{[2
]}

Chen, Chao-Ting ^{[5
]}

Wu, Wen-Jong ^{[5
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan

[3] Univ Washington, Dept Mech Engn, Seattle, WA 98195 USA

[4] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

[5] Natl Taiwan Univ, Engn Sci & Ocean Engn Dept, Taipei, Taiwan

来源：

ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XI | 2018年 / 10544卷

关键词：

Actuator; PZT scanner; Aerosol deposition; 2D Scanner system;

D O I：

10.1117/12.2291353

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Here we present a new rapid prototyped PZT MEMS actuator for potential 2D scanning endoscopic application. The proposed 6.1 mm x 7.1 mm x 5 mu m thick film PZT push-pull actuator made by directly deposited on a thin 100 mu m thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear 2D vibration using 1-D actuation. Initial fabrication results, electrical impedance, mechanical will be presented and discussed.

引用

页数：7

共 50 条

[21] 2D dosimetry using a computed radiography imaging system
Eriksson, J.
Munck af Rosenschold, P.
Engstrom, P.
Lervag, C.
Eilertsen, K.
Ceberg, C.
RADIOTHERAPY AND ONCOLOGY, 2007, 84 : S133 - S133
[22] 2D DIFFUSE OPTICAL IMAGING USING CLUSTERED SPARSITY
Chen, Chen
Tian, Fenghua
Yao, Jixing
Liu, Hanli
Huang, Junzhou
2014 IEEE 11TH INTERNATIONAL SYMPOSIUM ON BIOMEDICAL IMAGING (ISBI), 2014, : 616 - 619
[23] PRELIMINARY-RESULTS IN THE CONSTRUCTION OF A 2D IMAGING DEVICE WITH METASTABLE SUPERCONDUCTING GRAINS
LIMAGNE, D
JEUDY, V
HERES, O
GIRARD, TA
WAYSAND, G
JOURNAL OF LOW TEMPERATURE PHYSICS, 1993, 93 (3-4) : 473 - 478
[24] 3-D strain imaging using a rectilinear 2D array
Awad, Samer I.
Yen, Jesse T.
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 228 - 231
[25] 3D strain imaging using a rectilinear 2D array
Awad, Samer I.
Yen, Jesse T.
ULTRASONIC IMAGING, 2007, 29 (04) : 220 - 230
[26] Harnessing ion migration in 2D perovskites for fabricating diode heterostructure
Wu, Zhenyue
Leng, Kai
MATTER, 2024, 7 (08) : 2649 - 2651
[27] STRATEGIES OF FABRICATING GRAPHENE AND GRAPHENE-ANALOGOUS 2D NANOSHEETS
Zhang, Changsong
Wu, Weiming
Lu, Youchang
Hou, Shaogang
CERAMICS-SILIKATY, 2018, 62 (03) : 211 - 220
[28] Liquid Metals: A Novel Possibility of Fabricating 2D Metal Oxides
Zhao, Shasha
Zhang, Jiaqian
Fu, Lei
ADVANCED MATERIALS, 2021, 33 (09)
[29] Fabricating 3D Structures by Combining 2D Printing and Relaxation of Strain
Cafferty, Brian J.
Campbell, Victoria E.
Rothemund, Philipp
Preston, Daniel
Ainla, Alar
Fulleringer, Nicolas
Diaz, Alina C.
Fuentes, Alberto E.
Sameoto, Dan
Lewis, Jennifer A.
Whitesides, George M.
ADVANCED MATERIALS TECHNOLOGIES, 2019, 4 (01)
[30] PZT-actuated, 2D optical scanning image acquisition
Gu, Kebin
Lin, Keng-Ren
Wang, Wei-Chih
NANOSENSORS, BIOSENSORS, AND INFO-TECH SENSORS AND SYSTEMS 2014, 2014, 9060

← 1 2 3 4 5 →