Pressure sensors based on suspended graphene membranes

被引：72
|
作者：
Smith, Anderson. D. [1 ]
Vaziri, Sam [1 ]
Niklaus, Frank [1 ]
Fischer, Andreas. C. [1 ]
Sterner, Mikael [1 ]
Delin, Anna [1 ]
Ostling, Mikael [1 ]
Lemme, Max. C. [1 ,2 ]
机构：
[1] KTH Royal Inst Technol, S-16440 Kista, Sweden
[2] Univ Siegen, D-57076 Siegen, Germany
来源：
SOLID-STATE ELECTRONICS | 2013年 / 88卷
基金：
欧洲研究理事会;
关键词：
Graphene; Sensor; Pressure; Nanotechnology; NEMS and Nanoelectromechanical System; Piezoresistive;
D O I：
10.1016/j.sse.2013.04.019
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel pressure sensor based on a suspended graphene membrane is proposed. The sensing mechanism is explained based on tight binding calculations of strain-induced changes in the band structure. A CMOS compatible fabrication process is proposed and used to fabricate prototypes. Electrical measurement data demonstrates the feasibility of the approach, which has the advantage of not requiring a separate strain gauge, i.e. the strain gauge is integral part of the pressure sensor membrane. Hence, graphene membrane based pressure sensors can in principle be scaled quite aggressively in size. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码：89 / 94
页数：6
相关论文
共 50 条
  • [41] Graphene-Based Flexible High-Resolution Pressure Sensors
    Fu, Zhiyuan
    Zhu, Jionglu
    Zhang, Qiang
    Tang, Weitao
    Pei, Zhen
    Zeng, Yanhong
    Zhang, Chunyan
    Li, Qiang
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2024, 221 (11):
  • [42] Highly sensitive flexible pressure sensors based on graphene/graphene scrolls multilayer hybrid films
    Zhai, Yi-heng
    Wang, Tao
    Qi, Zhi-kai
    Kong, Xiang-hua
    Xu, Hang-xun
    Ji, Heng-xing
    CHINESE JOURNAL OF CHEMICAL PHYSICS, 2020, 33 (03) : 365 - 370
  • [43] Color tunable pressure sensors based on polymer nanostructured membranes for optofluidic applications
    P. Escudero
    J. Yeste
    C. Pascual-Izarra
    R. Villa
    M. Alvarez
    Scientific Reports, 9
  • [44] Color tunable pressure sensors based on polymer nanostructured membranes for optofluidic applications
    Escudero, P.
    Yeste, J.
    Pascual-Izarra, C.
    Villa, R.
    Alvarez, M.
    SCIENTIFIC REPORTS, 2019, 9 (1)
  • [45] Ammonia sensors based on suspended silicon nanowires
    Pichon, L.
    Salauen, A-C.
    Wenga, G.
    Rogel, R.
    Jacques, E.
    28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1003 - 1006
  • [46] Crossover from ballistic to diffusive thermal transport in suspended graphene membranes
    El Sachat, A.
    Koenemann, F.
    Menges, F.
    Del Corro, E.
    Garrido, J. A.
    Sotomayor Torres, C. M.
    Alzina, F.
    Gotsmann, B.
    2D MATERIALS, 2019, 6 (02)
  • [47] Experimental validation of multiscale modeling of indentation of suspended circular graphene membranes
    Wei, Xiaoding
    Kysar, Jeffrey W.
    INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2012, 49 (22) : 3201 - 3209
  • [48] Preliminary optical characterization of integrated electrically biased suspended graphene membranes
    Kozlowska, A.
    Lesniewska-Matys, K.
    Stankiewicz, R.
    Bogucki, O.
    Saeidi, N.
    Selvam, K.
    Wiemer, M.
    Kuhn, H.
    Panda, J.
    Kalbac, M.
    Ehsani, M.
    Joseph, Y.
    2D PHOTONIC MATERIALS AND DEVICES VII, 2024, 12888
  • [49] Millimeter-sized few-layer suspended graphene membranes
    Carvalho, Alexandre F.
    Fernandes, Antonio J. S.
    Ben Hassine, Mohamed
    Ferreira, Paulo
    Fortunato, Elvira
    Costa, Florinda M.
    APPLIED MATERIALS TODAY, 2020, 21
  • [50] Flexible Pressure Sensors with a Sandwich Structure Based on Vertical Graphene Nanowalls by HFCVD
    Weibiao Mao
    Honglie Shen
    Zehui Wang
    Bingjie Liao
    Jingzhe Zhang
    Junkui Zhu
    Yufang Li
    Tianru Wu
    Journal of Electronic Materials, 2023, 52 : 1526 - 1533
12345