Pressure sensors based on suspended graphene membranes

被引：72

作者：

Smith, Anderson. D. ^{[1
]}

Vaziri, Sam ^{[1
]}

Niklaus, Frank ^{[1
]}

Fischer, Andreas. C. ^{[1
]}

Sterner, Mikael ^{[1
]}

Delin, Anna ^{[1
]}

Ostling, Mikael ^{[1
]}

Lemme, Max. C. ^{[1
,2
]}

机构：

[1] KTH Royal Inst Technol, S-16440 Kista, Sweden

[2] Univ Siegen, D-57076 Siegen, Germany

来源：

SOLID-STATE ELECTRONICS | 2013年 / 88卷

基金：

欧洲研究理事会;

关键词：

Graphene; Sensor; Pressure; Nanotechnology; NEMS and Nanoelectromechanical System; Piezoresistive;

D O I：

10.1016/j.sse.2013.04.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel pressure sensor based on a suspended graphene membrane is proposed. The sensing mechanism is explained based on tight binding calculations of strain-induced changes in the band structure. A CMOS compatible fabrication process is proposed and used to fabricate prototypes. Electrical measurement data demonstrates the feasibility of the approach, which has the advantage of not requiring a separate strain gauge, i.e. the strain gauge is integral part of the pressure sensor membrane. Hence, graphene membrane based pressure sensors can in principle be scaled quite aggressively in size. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：89 / 94

页数：6

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