Multilevel diffractive optical elements fabricated with a single amplitude-phase mask

被引：6
|
作者：
Pawlowski, E
Engel, H
机构：
[1] Heinrich-Hertz-Institut für Nachrichtentechnik Berlin GmbH, 10587 Berlin
来源：
PURE AND APPLIED OPTICS | 1997年 / 6卷 / 06期
关键词：
D O I：
10.1088/0963-9659/6/6/007
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
To simplify the fabrication process of multilevel diffractive optical elements a new fabrication technique is presented. The fabrication process is based on a single optical lithography step and a subsequent dry-etching process. Lateral structures with dimensions of 180 nm were transferred. The fabricated diffractive optical elements show high optical performance with diffraction efficiencies of over 90%.
引用
收藏
页码：655 / 662
页数：8
相关论文
共 50 条
  • [21] Implementation of high-resolution diffractive optical elements on coupled phase and amplitude spatial light modulators
    Stolz, Christophe
    Blgué, Laurent
    Ambs, Pierre
    2001, Optical Society of America (OSA) (40):
  • [22] F2-laser microfabrication of multilevel diffractive optical elements
    Ng, M. L.
    Herman, P. R.
    Nejadmalayeri, A. H.
    Li, J.
    COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION, 2007, 59 : 696 - +
  • [23] Implementation of high-resolution diffractive optical elements on coupled phase and amplitude spatial light modulators
    Stolz, C
    Bigué, L
    Ambs, P
    APPLIED OPTICS, 2001, 40 (35) : 6415 - 6424
  • [24] PARAMETRIC OPTIMIZATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS BY ELECTROMAGNETIC THEORY
    NOPONEN, E
    TURUNEN, J
    VASARA, A
    APPLIED OPTICS, 1992, 31 (28): : 5910 - 5912
  • [25] Backward iterative quantization methods for designs of multilevel diffractive optical elements
    Hsu, WF
    OPTICS EXPRESS, 2005, 13 (13): : 5052 - 5063
  • [26] Polarization-multiplexed diffractive optical elements fabricated by subwavelength structures
    Yu, W
    Konishi, T
    Hamamoto, T
    Toyota, H
    Yotsuya, T
    Ichioka, Y
    APPLIED OPTICS, 2002, 41 (01) : 96 - 100
  • [27] Optimization Algorithm for Diffractive Optical Elements Based on Dynamic Amplitude Restriction
    Wang Bowei
    Xiu Longwang
    Tao, Xiang
    Gang, Li
    Hang, Zhang
    ACTA OPTICA SINICA, 2023, 43 (22)
  • [28] Analysis of application properties of diffractive optical elements fabricated by continuous technology
    Wang, W.
    Pei, M.
    Li, Y.P.
    Li, T.
    Hong, Y.L.
    Fu, S.J.
    Zhongguo Jiguang/Chinese Journal of Lasers, 2001, 28 (01): : 41 - 46
  • [29] Nonlinear optical cryptosystem free from amplitude-phase retrieval attacks
    Verma, Gaurav
    Sinha, Aloka
    2015 INTERNATIONAL CONFERENCE ON MICROWAVE, OPTICAL AND COMMUNICATION ENGINEERING (ICMOCE), 2015, : 29 - 32
  • [30] Ptychographic attack on the double random amplitude-phase optical encoding system
    Wang, Qian
    Li, Tuo
    FOURTH INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, 2021, 11761
12345