Evidence for hole traps at the amorphous silicon/amorphous silicon-germanium heterostructure interface

被引:5
|
作者
Palsule, C [1 ]
Paschen, U [1 ]
Cohen, JD [1 ]
Yang, J [1 ]
Guha, S [1 ]
机构
[1] UNITED SOLAR SYST CORP,TROY,MI 48084
关键词
D O I
10.1063/1.118192
中图分类号
O59 [应用物理学];
学科分类号
摘要
Voltage-pulse stimulated capacitance transient measurements on a series a-Si:H/a-Si, Ge:H devices disclose a large density of hole traps at or very close to the heterojunction interface. The transient signal magnitude is independent of temperature or applied bias, ruling out charge polarization effects or a defect creation process caused by the filling pulse. While the areal density of such hole traps is considerable (within a factor of 2 of 10(11) cm(-2) for all samples) these traps do not appear to behave as recombination centers. Also, the treatment of the a-Si:H/a-Si,Ge:H interface during growth can significantly alter the concentration of these traps. (C) 1997 American Institute of Physics.
引用
收藏
页码:499 / 501
页数:3
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