[1] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[4] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China
[5] Univ Nottingham Ningbo China, Fac Sci & Engn, Dept Elect & Elect Engn, Ningbo 315100, Zhejiang, Peoples R China
[6] Adv Ficrofabricat Equipment Inc, Shanghai 201201, Peoples R China