Computer Simulation of Experimental Methods to Investigate Materials and Structures of Micro- and Nanoelectronics

被引:0
|
作者
Kholomina, T. A. [1 ]
Malchenko, S., I [1 ]
Gudzev, V. V. [1 ]
Rybin, N. B. [1 ]
机构
[1] Ryazan State Radio Engn Univ, Dept Micro & Nanoelect, Ryazan, Russia
关键词
laboratory-based work; virtual laboratory; physical processes;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
The paper discusses the basic principles and implementation of laboratory complexes to realize methods for investigating properties of materials and structures for solid state electronics and nanoelectronics. The following laboratory complexes are developed: studying resistance of solid dielectrics; thermal analysis of metal alloys; analysis of spectra of deep levels using DLTS method. Virtual laboratory complexes developed in the environment of engineering graphical programming NI LabVIEW.
引用
收藏
页码:309 / 313
页数:5
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