Computer Simulation of Experimental Methods to Investigate Materials and Structures of Micro- and Nanoelectronics

被引:0
|
作者
Kholomina, T. A. [1 ]
Malchenko, S., I [1 ]
Gudzev, V. V. [1 ]
Rybin, N. B. [1 ]
机构
[1] Ryazan State Radio Engn Univ, Dept Micro & Nanoelect, Ryazan, Russia
关键词
laboratory-based work; virtual laboratory; physical processes;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
The paper discusses the basic principles and implementation of laboratory complexes to realize methods for investigating properties of materials and structures for solid state electronics and nanoelectronics. The following laboratory complexes are developed: studying resistance of solid dielectrics; thermal analysis of metal alloys; analysis of spectra of deep levels using DLTS method. Virtual laboratory complexes developed in the environment of engineering graphical programming NI LabVIEW.
引用
收藏
页码:309 / 313
页数:5
相关论文
共 50 条
  • [11] Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example
    D. I. Smirnov
    R. M. Giniyatyllin
    I. Yu. Zyul’kov
    N. A. Medetov
    N. N. Gerasimenko
    Technical Physics Letters, 2013, 39 : 640 - 643
  • [12] Micro- and Nanocapillary Structures Based on Dielectric Materials to Focus the Ion Beams
    Komarov, F. F.
    Kamyshan, A. S.
    Hryshyn, P. A.
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2013, 5 (01)
  • [13] SIMULATION OF THERMAL POSITIONING IN MICRO- AND NANO-SCALE BRIDGE STRUCTURES
    Maghsoudi, Elham
    Martin, Michael James
    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1, 2012, : 247 - 255
  • [14] EXPERIMENTAL MEASUREMENTS OF MECHANICAL RESPONSE IN MICRO- AND NANO-SCALE MATERIALS
    Hemker, K. J.
    NANOSTRUCTURED METALS: FUNDAMENTALS TO APPLICATIONS, 2009, : 45 - 57
  • [15] Experimental and Simulation Investigation of Micro- and Nano-Structured Neutron Detectors
    Logoglu, Faruk
    Albert, Patrick
    Wolfe, Douglas
    Flaska, Marek
    ANIMMA 2021 - ADVANCEMENTS IN NUCLEAR INSTRUMENTATION MEASUREMENT METHODS AND THEIR APPLICATIONS, 2021, 253
  • [16] A Mathematical Model of a Piezoelectric Micro- Machined Hydrophone With Simulation and Experimental Validation
    Wang, Qiang
    Zhao, Long
    Yang, Tingting
    Liao, Zhiwei
    Xue, Xiaobin
    Wu, Bin
    Zhang, Wenjun
    Zang, Junbin
    Cui, Danfeng
    Zhang, Zengxing
    Xue, Chenyang
    IEEE SENSORS JOURNAL, 2021, 21 (12) : 13364 - 13372
  • [17] Micro- and nanoporous materials developed using Supercritical CO2 -: Novel synthetic methods for the development of micro- and nanoporous materials toward microelectronic applications
    Paisner, SN
    DeSimone, JM
    POLYMERS FOR MICROELECTRONICS AND NANOELECTRONICS, 2004, 874 : 223 - 235
  • [18] Special issue - Materials and manufacturing processes on multifunctional micro- and nano-structures
    Soboyejo, Wole
    Savastano, Holmer, Jr.
    MATERIALS AND MANUFACTURING PROCESSES, 2007, 22 (02) : 139 - 139
  • [19] Linkage of inanimate structures to biological systems -: Smart materials in biological micro- and nanosystems
    Schütz, S
    Weissbecker, B
    Schroth, P
    Schöning, MJ
    SMART MATERIALS, 2001, : 149 - 157
  • [20] Characteristic features of the formation of dislocation structures in poly-, micro- and nanocrystalline materials
    Malygin, GA
    INTERNATIONAL WORKSHOP ON NONDESTRUCTIVE TESTING AND COMPUTER SIMULATIONS IN SCIENCE AND ENGINEERING, 1999, 3687 : 373 - 374