Precursor synthesis and atomic layer deposition of CoOx thin films

被引：0
|
作者：
Kim, Jiyeon [1 ]
Fischer, Roland [1 ]
Devi, Anjana [1 ]
机构：
[1] Ruhr Univ Bochum, Chem & Biochem, Bochum, Germany
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2015年 / 250卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
499
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页数：1
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