Precursor synthesis and atomic layer deposition of CoOx thin films

被引：0
|
作者：
Kim, Jiyeon [1 ]
Fischer, Roland [1 ]
Devi, Anjana [1 ]
机构：
[1] Ruhr Univ Bochum, Chem & Biochem, Bochum, Germany
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2015年 / 250卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
499
引用
收藏
页数：1
相关论文
共 50 条
  • [31] Synthesis and Characterization of Nanocoatings Thin films by Atomic Layer Deposition for Medical Applications
    Wadullah, Haitham M.
    Ajeel, Sami Abualnoun
    Abbass, Muna Khethier
    2ND INTERNATIONAL CONFERENCE ON SUSTAINABLE ENGINEERING TECHNIQUES (ICSET 2019), 2019, 518
  • [32] Atomic Layer Deposition of Zinc Glutarate Thin Films
    Salmi, Leo D.
    Mattinen, Miika
    Niemi, Teemu
    Heikkila, Mikko J.
    Mizohata, Kenichiro
    Korhonen, Sanna
    Hirvonen, Sami-Pekka
    Raisanen, Jyrki
    Ritala, Mikko
    ADVANCED MATERIALS INTERFACES, 2017, 4 (22):
  • [33] Nickel Germanide Thin Films by Atomic Layer Deposition
    Vayrynen, Katja
    Vihervaara, Anton
    Hatanpaa, Timo
    Mattinen, Miika
    Heikkila, Mikko J.
    Mizohata, Kenichiro
    Raisanen, Jyrki
    Ritala, Mikko
    Leskela, Markku
    CHEMISTRY OF MATERIALS, 2019, 31 (14) : 5314 - 5319
  • [34] Atomic layer deposition of copper sulfide thin films
    Schneider, Nathanaelle
    Lincot, Daniel
    Donsanti, Frederique
    THIN SOLID FILMS, 2016, 600 : 103 - 108
  • [35] Ruthenium thin films grown by atomic layer deposition
    Aaltonen, Titta
    Alén, Petra
    Ritala, Mikko
    Leskelä, Markku
    Advanced Materials, 2003, 15 (01) : 45 - 49
  • [36] Atomic layer deposition of sodium fluoride thin films
    Kuraitis, Sara
    Kang, Donghyeon
    Mane, Anil U.
    Zhou, Hua
    Soares, Jake
    Elam, Jeffrey W.
    Graugnard, Elton
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021, 39 (03):
  • [37] Atomic Layer Deposition of Molybdenum Carbide Thin Films
    Karkkainen, Paloma Ruiz
    Popov, Georgi
    Hatanpaa, Timo
    Kemppinen, Antti
    Kohopaa, Katja
    Bagheri, Mohammad
    Komsa, Hannu-Pekka
    Heikkila, Mikko
    Mizohata, Kenichiro
    Chundak, Mykhailo
    Deminskyi, Petro
    Vihervaara, Anton
    Ribeiro, Mario
    Hatinen, Joel
    Govenius, Joonas
    Putkonen, Matti
    Ritala, Mikko
    ADVANCED MATERIALS INTERFACES, 2024, 11 (26):
  • [38] Atomic Layer Deposition of Tin Monosulfide Thin Films
    Sinsermsuksakul, Prasert
    Heo, Jaeyeong
    Noh, Wontae
    Hock, Adam S.
    Gordon, Roy G.
    ADVANCED ENERGY MATERIALS, 2011, 1 (06) : 1116 - 1125
  • [39] Rubidium containing thin films by atomic layer deposition
    Sonsteby, Henrik H.
    Weibye, Kristian
    Bratvold, Jon E.
    Nilsen, Ola
    DALTON TRANSACTIONS, 2017, 46 (46) : 16139 - 16144
  • [40] Atomic layer deposition of zirconium oxide thin films
    Wang, Xin
    Ghosh, Sujan
    Afshar-Mohajer, Mahyar
    Zhou, Hua
    Liu, Yongqiang
    Han, Xiaoxiao
    Cai, Jiyu
    Zou, Min
    Meng, Xiangbo
    JOURNAL OF MATERIALS RESEARCH, 2020, 35 (07) : 804 - 812
12345