Carbon stripper foil preparation by ion beam sputtering with 3.5 keV Kr ions

被引：10
|
作者：
Sugai, I [1 ]
Oyaizu, M [1 ]
Kawakami, H [1 ]
Hattori, T [1 ]
Tomizawa, H [1 ]
Kawasaki, K [1 ]
机构：
[1] TOKYO INST TECHNOL,MEGURO KU,TOKYO 152,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1997年 / 397卷 / 01期
关键词：
carbon stripper; electron diffraction; purity of target; sputtering; stripper lifetime; vacuum deposition;
D O I：
10.1016/S0168-9002(97)00763-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Heavy ion-beam sputtering with low beam voltage was found to be applicable for the preparation of long-lived carbon stripper foils. A test foil (25 mu g/cm(2)) made by this method survived an integrated ion current of 6213 mC/cm(2) corresponding a lifetime of about 200 times the best commercially available foil made by evaporation-condensation. The present method can be expected to be applicable to magnetron sputtering for mass production of carbon stripper foils.
引用
收藏
页码：137 / 139
页数：3
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