Laser-induced liquid-phase jet-chemical etching of metals

被引：24

作者：

Stephen, A ^{[1
]}

Sepold, G ^{[1
]}

Metev, S ^{[1
]}

Vollertsen, F ^{[1
]}

机构：

[1] BIAS, D-28359 Bremen, Germany

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2004年 / 149卷 / 1-3期

关键词：

jet-chemical etching; shape memory alloys; micro-grippers;

D O I：

10.1016/j.jmatprotec.2003.10.052

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this treatment method laser radiation, which is guided from a co-axially expanding liquid jet-stream, locally initiates on a metal surface a thermochemical etching reaction, which leads to selective material removal. Time-resolved measurements of the electrical potential were correlated with the specific processing parameters to identify conditions for stable and enhanced chemical etching reactions. The chemical etching reaction was additionally influenced by an electrical field. Depending on its polarity a significant increase in the etch rate or improvement of the treatment quality was observed. Exemplary, the fabrication of superelastic micro-grippers prepared by cutting of temperature-sensitive shape memory alloys is shown. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：536 / 540

页数：5

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