Improvement of Electrical Characteristics and Stability of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors Using Nitrocellulose Passivation Layer

被引:49
|
作者
Shin, Kwan Yup [1 ]
Tak, Young Jun [1 ]
Kim, Won-Gi [1 ]
Hong, Seonghwan [1 ]
Kim, Hyun Jae [1 ]
机构
[1] Yonsei Univ, Sch Elect & Elect Engn, 50 Yonsei Ro, Seoul 120749, South Korea
关键词
oxide semiconductor; thin-film transistors; a-IGZO; passivation; nitrocellulose; PERFORMANCE;
D O I
10.1021/acsami.7b00257
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this research, nitrocellulose is proposed as a new material for the passivation layers of amorphous indium gallium zinc oxide thin film transistors (a-IGZO TFTs). The a-IGZO TFTs with nitrocellulose passivation layers (NC-PVLs) demonstrate improved electrical characteristics and stability. The a-IGZO TFTs with NC-PVLs exhibit improvements in field-effect mobility (mu(FE)) from 11.72 +/- 1.14 to 20.68 +/- 1.94 cm(2)/(V s), threshold voltage (Vth) from 1.8 +/- 1.19 to 0.56 +/- 0.35 V, and on/off current ratio (I-on/off) from (5.31 +/- 2.19) X 10(7) to (4.79 +/- 1.54) X 10(8) compared to a-IGZO TFTs without PVLs, respectively. The Vth, shifts of a-IGZO TFTs without PVLs, with poly(methyl methacrylate) (PMMA) PVLs, and with NC-PVLs under positive bias stress (PBS) test for 10,000 s represented 5.08, 3.94, and 2.35 V, respectively. These improvements were induced by nitrogen diffusion from NC-PVLs to a-IGZO TFTs. The lone-pair electrons of diffused nitrogen attract weakly bonded oxygen serving as defect sites in a-IGZO TFTs. Consequently, the electrical characteristics are improved by an increase of carrier concentration in a-IGZO TFTs, and a decrease of defects in the back channel layer. Also, NC-PVLs have an excellent property as a barrier against ambient gases. Therefore, the NC-PVL is a promising passivation layer for next-generation display devices that simultaneously can improve electrical characteristics and stability against ambient gases.
引用
收藏
页码:13278 / 13285
页数:8
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