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Improvement of Electrical Characteristics and Stability of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors Using Nitrocellulose Passivation Layer
被引:49
|作者:
Shin, Kwan Yup
[1
]
Tak, Young Jun
[1
]
Kim, Won-Gi
[1
]
Hong, Seonghwan
[1
]
Kim, Hyun Jae
[1
]
机构:
[1] Yonsei Univ, Sch Elect & Elect Engn, 50 Yonsei Ro, Seoul 120749, South Korea
关键词:
oxide semiconductor;
thin-film transistors;
a-IGZO;
passivation;
nitrocellulose;
PERFORMANCE;
D O I:
10.1021/acsami.7b00257
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
In this research, nitrocellulose is proposed as a new material for the passivation layers of amorphous indium gallium zinc oxide thin film transistors (a-IGZO TFTs). The a-IGZO TFTs with nitrocellulose passivation layers (NC-PVLs) demonstrate improved electrical characteristics and stability. The a-IGZO TFTs with NC-PVLs exhibit improvements in field-effect mobility (mu(FE)) from 11.72 +/- 1.14 to 20.68 +/- 1.94 cm(2)/(V s), threshold voltage (Vth) from 1.8 +/- 1.19 to 0.56 +/- 0.35 V, and on/off current ratio (I-on/off) from (5.31 +/- 2.19) X 10(7) to (4.79 +/- 1.54) X 10(8) compared to a-IGZO TFTs without PVLs, respectively. The Vth, shifts of a-IGZO TFTs without PVLs, with poly(methyl methacrylate) (PMMA) PVLs, and with NC-PVLs under positive bias stress (PBS) test for 10,000 s represented 5.08, 3.94, and 2.35 V, respectively. These improvements were induced by nitrogen diffusion from NC-PVLs to a-IGZO TFTs. The lone-pair electrons of diffused nitrogen attract weakly bonded oxygen serving as defect sites in a-IGZO TFTs. Consequently, the electrical characteristics are improved by an increase of carrier concentration in a-IGZO TFTs, and a decrease of defects in the back channel layer. Also, NC-PVLs have an excellent property as a barrier against ambient gases. Therefore, the NC-PVL is a promising passivation layer for next-generation display devices that simultaneously can improve electrical characteristics and stability against ambient gases.
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页码:13278 / 13285
页数:8
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