Growth of InGaN alloy on cubic GaN by metalorganic vapor-phase epitaxy
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作者:
Nakadaira, A
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Nippon Telegraph & Tel Corp, Cyber Space Labs, Musashino, Tokyo 1808585, JapanNippon Telegraph & Tel Corp, Cyber Space Labs, Musashino, Tokyo 1808585, Japan
Nakadaira, A
[1
]
Tanaka, H
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Nippon Telegraph & Tel Corp, Cyber Space Labs, Musashino, Tokyo 1808585, JapanNippon Telegraph & Tel Corp, Cyber Space Labs, Musashino, Tokyo 1808585, Japan
Tanaka, H
[1
]
机构:
[1] Nippon Telegraph & Tel Corp, Cyber Space Labs, Musashino, Tokyo 1808585, Japan
Cubic InGaN alloys were grown on cubic GaN/GaAs (100) using low-pressure metalorganic vapor-phase epitaxy. A high-resolution cross-sectional transmission electron microscope image revealed their cubic crystal structure. In0.03Ga0.97N grown at 770 degrees C showed near band edge emission at 3.12 eV and its peak width was 110 meV at room temperature. The indium molar fraction tended to decrease when the growth temperature increased above 720 degrees C It also decreased as the NH3 flow rate decreased. The lowest energy of the near-band edge emission of these InGaN alloys at room temperature was 2.98 eV.