Fabrication and Physical Properties of Coatings Belonging to W, Ta, Hf, Ti, Mo, Cr, Al and C Based Multicomponent Systems

被引：2

作者：

Kosminska, Yu. O. ^{[1
]}

Kornyushchenko, G. S. ^{[1
]}

Gannych, Yu. V. ^{[1
]}

Perekrestov, V. I. ^{[1
]}

机构：

[1] Sumy State Univ, UA-40007 Sumy, Ukraine

来源：

JOURNAL OF SUPERHARD MATERIALS | 2020年 / 42卷 / 06期

关键词：

multicomponent coatings; carbon; carbides; elemental composition; phase composition; (TIZRNBHFTA)N; FILMS; HARD;

D O I：

10.3103/S1063457620060040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new technological approach to the fabrication of multicomponent coatings via the ion sputtering of a rod, which is composed of disks of such elements as W, Ta, Hf, Ti, Mo, Cr, Al, and C and coaxially placed inside a tube with an inner diameter of 39 mm, has been developed. A face-centered cubic phase with a lattice parameter close to the value for TiC is formed at a concentration of 41-55 at % of carbon and 34-37 at % of titanium, and the transition into an amorphous state with a simultaneous increase in the microhardness to 21 GPa occurs at a maximum concentration of Ta, Hf, Ti, Mo, Cr, and W.

引用

页码：388 / 395

页数：8

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