Fabrication and Physical Properties of Coatings Belonging to W, Ta, Hf, Ti, Mo, Cr, Al and C Based Multicomponent Systems

A new technological approach to the fabrication of multicomponent coatings via the ion sputtering of a rod, which is composed of disks of such elements as W, Ta, Hf, Ti, Mo, Cr, Al, and C and coaxially placed inside a tube with an inner diameter of 39 mm, has been developed. A face-centered cubic phase with a lattice parameter close to the value for TiC is formed at a concentration of 41-55 at % of carbon and 34-37 at % of titanium, and the transition into an amorphous state with a simultaneous increase in the microhardness to 21 GPa occurs at a maximum concentration of Ta, Hf, Ti, Mo, Cr, and W.