RF Transient Pulse Signal Integrity with ns-Duration for Atom-Probe Tomography

Improvement of atom probe tomography requires the high voltage rectangular short pulses. This typical RF transient pulse must be applied on a sample inside an ultra-high vacuum (UHV) chamber. In this letter, we present a synthesis technique of rectangular pulse signal with full width ns-duration. The pulse signal was injected into the cryogenic analysis chamber through the transmitting system composed of a microstrip transmission line. The system frequency characterization based on the S-parameter analysis and RF engineering shows the transmitting system major deterrent. The preliminary experimental result demonstrates that the atom probe performance is improved.