Enhanced Two-Photon Absorption in Polycrystalline Silicon

被引：0
|
作者：
Mehta, Karan [1 ]
Orcutt, Jason [1 ]
Ram, Rajeev [1 ]
机构：
[1] MIT, Elect Res Lab, Cambridge, MA USA
来源：
2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2011年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We discuss measurements of the two-photon absorption coefficient (beta) in polycrystalline silicon deposited in a scaled CMOS process; measurements in thin film, waveguides and microring resonators indicate beta is over two orders of magnitude larger than in crystalline silicon.
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页数：2
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