共 50 条
- [32] MEV PROTON BACKSCATTERING ANALYSIS OF ION-IMPLANTED POLYMERS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6): : 288 - 292
- [35] Advanced micromachine fabrication using ion-implanted layers Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1999, 155 (01): : 79 - 84
- [37] Ion-implanted resist removal using atomic hydrogen THIN SOLID FILMS, 2011, 519 (14) : 4578 - 4581
- [39] OPTICAL PROFILE ANALYSIS OF DIFFUSED AND ION-IMPLANTED SILICON PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 105 (02): : 627 - 635
- [40] SYSTEMATIC ANALYSIS OF DEFECTS IN ION-IMPLANTED SILICON. Applied physics. A, Solids and surfaces, 1988, A45 (01): : 1 - 34