Modelling. simulation and optimization for a SThm nanoprobe

被引：0

作者：

Yang, Bin ^{[1
]}

Lenczner, Michel ^{[2
]}

Cogan, Scott ^{[1
]}

Menges, Fabian ^{[3
]}

Riel, Heike ^{[3
]}

Gotsmann, Bernd ^{[3
]}

Janus, Pawel ^{[4
]}

Boetch, Guillaume ^{[5
]}

机构：

[1] Univ Franche Comte, FEMTO ST, Belfort, France

[2] Univ Technol Belfort Montbeliard, FEMTO ST, Belfort, France

[3] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland

[4] Inst Electr Mat Technol, PL-02669 Warsaw, Poland

[5] Imina Technol SA, CH-1015 Lausanne, Switzerland

来源：

2014 15TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2014年

关键词：

Scanning thermal microscopy; Nanoprobe; Tip-surface contact; Interface thermal conductance; Multi-objective optimization; Asymptotic model; CANTILEVER; NANOSCALE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents modelling, simulation and optimization results for a novel SThm probe. The model takes into account thermo-electro-mechanical equations. Moreover, a tip-surface contact model derived by taking into account microscopic multi-asperity contact is proposed and discussed. Results of multi-objective optimization are reported, and finally a multi-scale model that should reduce the simulation time is stated.

引用

页数：6

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