Modelling. simulation and optimization for a SThm nanoprobe

被引：0
|
作者：
Yang, Bin [1 ]
Lenczner, Michel [2 ]
Cogan, Scott [1 ]
Menges, Fabian [3 ]
Riel, Heike [3 ]
Gotsmann, Bernd [3 ]
Janus, Pawel [4 ]
Boetch, Guillaume [5 ]
机构：
[1] Univ Franche Comte, FEMTO ST, Belfort, France
[2] Univ Technol Belfort Montbeliard, FEMTO ST, Belfort, France
[3] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland
[4] Inst Electr Mat Technol, PL-02669 Warsaw, Poland
[5] Imina Technol SA, CH-1015 Lausanne, Switzerland
来源：
2014 15TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2014年
关键词：
Scanning thermal microscopy; Nanoprobe; Tip-surface contact; Interface thermal conductance; Multi-objective optimization; Asymptotic model; CANTILEVER; NANOSCALE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents modelling, simulation and optimization results for a novel SThm probe. The model takes into account thermo-electro-mechanical equations. Moreover, a tip-surface contact model derived by taking into account microscopic multi-asperity contact is proposed and discussed. Results of multi-objective optimization are reported, and finally a multi-scale model that should reduce the simulation time is stated.
引用
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页数：6
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